results. At one time plane, a couple of the radicals concentrations changed at the ~5.0E-3 level. This seems to be a nontrivial change, however, I this we should let it pass. I sense this problem could be made more stable if the nonlinear convergence requirements were made a lot stricter, while maintaining the same time step truncation error tolerances.
628 lines
23 KiB
XML
628 lines
23 KiB
XML
<?xml version="1.0"?>
|
|
<ctml>
|
|
<validate reactions="yes" species="yes"/>
|
|
|
|
<!-- phase silane -->
|
|
<phase dim="3" id="silane">
|
|
<elementArray datasrc="elements.xml">Si H He </elementArray>
|
|
<speciesArray datasrc="#species_data">
|
|
H2 H HE SIH4 SI SIH SIH2 SIH3 H3SISIH SI2H6
|
|
H2SISIH2 SI3H8 SI2 SI3 </speciesArray>
|
|
<reactionArray datasrc="#reaction_data"/>
|
|
<state>
|
|
<temperature units="K">300.0</temperature>
|
|
<pressure units="Pa">101325.0</pressure>
|
|
</state>
|
|
<thermo model="IdealGas"/>
|
|
<kinetics model="GasKinetics"/>
|
|
<transport model="Mix"/>
|
|
</phase>
|
|
|
|
<!-- species definitions -->
|
|
<speciesData id="species_data">
|
|
|
|
<!-- species H2 -->
|
|
<species name="H2">
|
|
<atomArray>H:2 </atomArray>
|
|
<note>TPIS78</note>
|
|
<thermo>
|
|
<NASA Tmax="1000.0" Tmin="200.0" P0="100000.0">
|
|
<floatArray name="coeffs" size="7">
|
|
2.344331120E+00, 7.980520750E-03, -1.947815100E-05, 2.015720940E-08,
|
|
-7.376117610E-12, -9.179351730E+02, 6.830102380E-01</floatArray>
|
|
</NASA>
|
|
<NASA Tmax="3500.0" Tmin="1000.0" P0="100000.0">
|
|
<floatArray name="coeffs" size="7">
|
|
3.337279200E+00, -4.940247310E-05, 4.994567780E-07, -1.795663940E-10,
|
|
2.002553760E-14, -9.501589220E+02, -3.205023310E+00</floatArray>
|
|
</NASA>
|
|
</thermo>
|
|
<transport model="gas_transport">
|
|
<string title="geometry">linear</string>
|
|
<LJ_welldepth units="K">38.000</LJ_welldepth>
|
|
<LJ_diameter units="A">2.920</LJ_diameter>
|
|
<dipoleMoment units="Debye">0.000</dipoleMoment>
|
|
<polarizability units="A3">0.790</polarizability>
|
|
<rotRelax>280.000</rotRelax>
|
|
</transport>
|
|
</species>
|
|
|
|
<!-- species H -->
|
|
<species name="H">
|
|
<atomArray>H:1 </atomArray>
|
|
<note>L 7/88</note>
|
|
<thermo>
|
|
<NASA Tmax="1000.0" Tmin="200.0" P0="100000.0">
|
|
<floatArray name="coeffs" size="7">
|
|
2.500000000E+00, 7.053328190E-13, -1.995919640E-15, 2.300816320E-18,
|
|
-9.277323320E-22, 2.547365990E+04, -4.466828530E-01</floatArray>
|
|
</NASA>
|
|
<NASA Tmax="3500.0" Tmin="1000.0" P0="100000.0">
|
|
<floatArray name="coeffs" size="7">
|
|
2.500000010E+00, -2.308429730E-11, 1.615619480E-14, -4.735152350E-18,
|
|
4.981973570E-22, 2.547365990E+04, -4.466829140E-01</floatArray>
|
|
</NASA>
|
|
</thermo>
|
|
<transport model="gas_transport">
|
|
<string title="geometry">atom</string>
|
|
<LJ_welldepth units="K">145.000</LJ_welldepth>
|
|
<LJ_diameter units="A">2.050</LJ_diameter>
|
|
<dipoleMoment units="Debye">0.000</dipoleMoment>
|
|
<polarizability units="A3">0.000</polarizability>
|
|
<rotRelax>0.000</rotRelax>
|
|
</transport>
|
|
</species>
|
|
|
|
<!-- species HE -->
|
|
<species name="HE">
|
|
<atomArray>He:1 </atomArray>
|
|
<note>120186</note>
|
|
<thermo>
|
|
<NASA Tmax="1000.0" Tmin="300.0" P0="100000.0">
|
|
<floatArray name="coeffs" size="7">
|
|
2.500000000E+00, 0.000000000E+00, 0.000000000E+00, 0.000000000E+00,
|
|
0.000000000E+00, -7.453750000E+02, 9.153488000E-01</floatArray>
|
|
</NASA>
|
|
<NASA Tmax="5000.0" Tmin="1000.0" P0="100000.0">
|
|
<floatArray name="coeffs" size="7">
|
|
2.500000000E+00, 0.000000000E+00, 0.000000000E+00, 0.000000000E+00,
|
|
0.000000000E+00, -7.453750000E+02, 9.153489000E-01</floatArray>
|
|
</NASA>
|
|
</thermo>
|
|
<transport model="gas_transport">
|
|
<string title="geometry">atom</string>
|
|
<LJ_welldepth units="K">10.200</LJ_welldepth>
|
|
<LJ_diameter units="A">2.580</LJ_diameter>
|
|
<dipoleMoment units="Debye">0.000</dipoleMoment>
|
|
<polarizability units="A3">0.000</polarizability>
|
|
<rotRelax>0.000</rotRelax>
|
|
</transport>
|
|
</species>
|
|
|
|
<!-- species SIH4 -->
|
|
<species name="SIH4">
|
|
<atomArray>H:4 Si:1 </atomArray>
|
|
<note>90784</note>
|
|
<thermo>
|
|
<NASA Tmax="1000.0" Tmin="300.0" P0="100000.0">
|
|
<floatArray name="coeffs" size="7">
|
|
1.451640400E+00, 1.398736300E-02, -4.234563900E-06, -2.360614200E-09,
|
|
1.371208900E-12, 3.113410500E+03, 1.232185500E+01</floatArray>
|
|
</NASA>
|
|
<NASA Tmax="2000.0" Tmin="1000.0" P0="100000.0">
|
|
<floatArray name="coeffs" size="7">
|
|
7.935938000E-01, 1.767189900E-02, -1.139800900E-05, 3.599260400E-09,
|
|
-4.524157100E-13, 3.198212700E+03, 1.524225700E+01</floatArray>
|
|
</NASA>
|
|
</thermo>
|
|
<transport model="gas_transport">
|
|
<string title="geometry">nonlinear</string>
|
|
<LJ_welldepth units="K">207.600</LJ_welldepth>
|
|
<LJ_diameter units="A">4.080</LJ_diameter>
|
|
<dipoleMoment units="Debye">0.000</dipoleMoment>
|
|
<polarizability units="A3">0.000</polarizability>
|
|
<rotRelax>1.000</rotRelax>
|
|
</transport>
|
|
</species>
|
|
|
|
<!-- species SI -->
|
|
<species name="SI">
|
|
<atomArray>Si:1 </atomArray>
|
|
<note>J 3/67</note>
|
|
<thermo>
|
|
<NASA Tmax="1000.0" Tmin="300.0" P0="100000.0">
|
|
<floatArray name="coeffs" size="7">
|
|
3.179353700E+00, -2.764699200E-03, 4.478403800E-06, -3.283317700E-09,
|
|
9.121363100E-13, 5.333903200E+04, 2.727320400E+00</floatArray>
|
|
</NASA>
|
|
<NASA Tmax="5000.0" Tmin="1000.0" P0="100000.0">
|
|
<floatArray name="coeffs" size="7">
|
|
2.650601400E+00, -3.576385200E-04, 2.959229300E-07, -7.280482900E-11,
|
|
5.796332900E-15, 5.343705400E+04, 5.220405700E+00</floatArray>
|
|
</NASA>
|
|
</thermo>
|
|
<transport model="gas_transport">
|
|
<string title="geometry">atom</string>
|
|
<LJ_welldepth units="K">3036.000</LJ_welldepth>
|
|
<LJ_diameter units="A">2.910</LJ_diameter>
|
|
<dipoleMoment units="Debye">0.000</dipoleMoment>
|
|
<polarizability units="A3">0.000</polarizability>
|
|
<rotRelax>0.000</rotRelax>
|
|
</transport>
|
|
</species>
|
|
|
|
<!-- species SIH -->
|
|
<species name="SIH">
|
|
<atomArray>H:1 Si:1 </atomArray>
|
|
<note>121986</note>
|
|
<thermo>
|
|
<NASA Tmax="1000.0" Tmin="300.0" P0="100000.0">
|
|
<floatArray name="coeffs" size="7">
|
|
3.836010000E+00, -2.702657000E-03, 6.849070000E-06, -5.424184000E-09,
|
|
1.472131000E-12, 4.507593000E+04, 9.350778000E-01</floatArray>
|
|
</NASA>
|
|
<NASA Tmax="2000.0" Tmin="1000.0" P0="100000.0">
|
|
<floatArray name="coeffs" size="7">
|
|
3.110430000E+00, 1.094946000E-03, 2.898629000E-08, -2.745104000E-10,
|
|
7.051799000E-14, 4.516898000E+04, 4.193487000E+00</floatArray>
|
|
</NASA>
|
|
</thermo>
|
|
<transport model="gas_transport">
|
|
<string title="geometry">linear</string>
|
|
<LJ_welldepth units="K">95.800</LJ_welldepth>
|
|
<LJ_diameter units="A">3.660</LJ_diameter>
|
|
<dipoleMoment units="Debye">0.000</dipoleMoment>
|
|
<polarizability units="A3">0.000</polarizability>
|
|
<rotRelax>1.000</rotRelax>
|
|
</transport>
|
|
</species>
|
|
|
|
<!-- species SIH2 -->
|
|
<species name="SIH2">
|
|
<atomArray>H:2 Si:1 </atomArray>
|
|
<note>42489</note>
|
|
<thermo>
|
|
<NASA Tmax="1000.0" Tmin="300.0" P0="100000.0">
|
|
<floatArray name="coeffs" size="7">
|
|
3.475092000E+00, 2.139338000E-03, 7.672306000E-07, 5.217668000E-10,
|
|
-9.898824000E-13, 3.147397000E+04, 4.436585000E+00</floatArray>
|
|
</NASA>
|
|
<NASA Tmax="3000.0" Tmin="1000.0" P0="100000.0">
|
|
<floatArray name="coeffs" size="7">
|
|
4.142390000E+00, 2.150191000E-03, -2.190730000E-07, -2.073725000E-10,
|
|
4.741018000E-14, 3.110484000E+04, 2.930745000E-01</floatArray>
|
|
</NASA>
|
|
</thermo>
|
|
<transport model="gas_transport">
|
|
<string title="geometry">nonlinear</string>
|
|
<LJ_welldepth units="K">133.100</LJ_welldepth>
|
|
<LJ_diameter units="A">3.800</LJ_diameter>
|
|
<dipoleMoment units="Debye">0.000</dipoleMoment>
|
|
<polarizability units="A3">0.000</polarizability>
|
|
<rotRelax>1.000</rotRelax>
|
|
</transport>
|
|
</species>
|
|
|
|
<!-- species SIH3 -->
|
|
<species name="SIH3">
|
|
<atomArray>H:3 Si:1 </atomArray>
|
|
<note>42489</note>
|
|
<thermo>
|
|
<NASA Tmax="1000.0" Tmin="300.0" P0="100000.0">
|
|
<floatArray name="coeffs" size="7">
|
|
2.946733000E+00, 6.466764000E-03, 5.991653000E-07, -2.218413000E-09,
|
|
3.052670000E-13, 2.270173000E+04, 7.347948000E+00</floatArray>
|
|
</NASA>
|
|
<NASA Tmax="3000.0" Tmin="1000.0" P0="100000.0">
|
|
<floatArray name="coeffs" size="7">
|
|
5.015906000E+00, 3.732750000E-03, -3.609053000E-07, -3.729193000E-10,
|
|
8.468490000E-14, 2.190233000E+04, -4.291368000E+00</floatArray>
|
|
</NASA>
|
|
</thermo>
|
|
<transport model="gas_transport">
|
|
<string title="geometry">nonlinear</string>
|
|
<LJ_welldepth units="K">170.300</LJ_welldepth>
|
|
<LJ_diameter units="A">3.940</LJ_diameter>
|
|
<dipoleMoment units="Debye">0.000</dipoleMoment>
|
|
<polarizability units="A3">0.000</polarizability>
|
|
<rotRelax>1.000</rotRelax>
|
|
</transport>
|
|
</species>
|
|
|
|
<!-- species H3SISIH -->
|
|
<species name="H3SISIH">
|
|
<atomArray>H:4 Si:2 </atomArray>
|
|
<note>111191</note>
|
|
<thermo>
|
|
<NASA Tmax="1500.0" Tmin="300.0" P0="100000.0">
|
|
<floatArray name="coeffs" size="7">
|
|
3.698707000E+00, 1.870180000E-02, -1.430704000E-05, 6.005836000E-09,
|
|
-1.116293000E-12, 3.590825000E+04, 8.825191000E+00</floatArray>
|
|
</NASA>
|
|
<NASA Tmax="4000.0" Tmin="1500.0" P0="100000.0">
|
|
<floatArray name="coeffs" size="7">
|
|
1.127202000E+01, 2.538145000E-03, -2.998472000E-07, -9.465367000E-11,
|
|
1.855053000E-14, 3.297169000E+04, -3.264598000E+01</floatArray>
|
|
</NASA>
|
|
</thermo>
|
|
<transport model="gas_transport">
|
|
<string title="geometry">nonlinear</string>
|
|
<LJ_welldepth units="K">312.600</LJ_welldepth>
|
|
<LJ_diameter units="A">4.600</LJ_diameter>
|
|
<dipoleMoment units="Debye">0.000</dipoleMoment>
|
|
<polarizability units="A3">0.000</polarizability>
|
|
<rotRelax>1.000</rotRelax>
|
|
</transport>
|
|
</species>
|
|
|
|
<!-- species SI2H6 -->
|
|
<species name="SI2H6">
|
|
<atomArray>H:6 Si:2 </atomArray>
|
|
<note>90784</note>
|
|
<thermo>
|
|
<NASA Tmax="1000.0" Tmin="300.0" P0="100000.0">
|
|
<floatArray name="coeffs" size="7">
|
|
6.734798300E-01, 4.093153100E-02, -4.484125500E-05, 2.995223200E-08,
|
|
-8.901085400E-12, 7.932787500E+03, 1.862740300E+01</floatArray>
|
|
</NASA>
|
|
<NASA Tmax="2000.0" Tmin="1000.0" P0="100000.0">
|
|
<floatArray name="coeffs" size="7">
|
|
3.407493600E+00, 2.720647900E-02, -1.771320400E-05, 5.639117700E-09,
|
|
-7.137868200E-13, 7.532184200E+03, 6.132175400E+00</floatArray>
|
|
</NASA>
|
|
</thermo>
|
|
<transport model="gas_transport">
|
|
<string title="geometry">nonlinear</string>
|
|
<LJ_welldepth units="K">301.300</LJ_welldepth>
|
|
<LJ_diameter units="A">4.830</LJ_diameter>
|
|
<dipoleMoment units="Debye">0.000</dipoleMoment>
|
|
<polarizability units="A3">0.000</polarizability>
|
|
<rotRelax>1.000</rotRelax>
|
|
</transport>
|
|
</species>
|
|
|
|
<!-- species H2SISIH2 -->
|
|
<species name="H2SISIH2">
|
|
<atomArray>H:4 Si:2 </atomArray>
|
|
<note>42489</note>
|
|
<thermo>
|
|
<NASA Tmax="1000.0" Tmin="300.0" P0="100000.0">
|
|
<floatArray name="coeffs" size="7">
|
|
5.133186000E+00, 1.252855000E-02, -4.620421000E-07, -6.606075000E-09,
|
|
2.864345000E-12, 2.956915000E+04, 7.605133000E-01</floatArray>
|
|
</NASA>
|
|
<NASA Tmax="3000.0" Tmin="1000.0" P0="100000.0">
|
|
<floatArray name="coeffs" size="7">
|
|
8.986817000E+00, 5.405047000E-03, -5.214022000E-07, -5.313742000E-10,
|
|
1.188727000E-13, 2.832748000E+04, -2.004478000E+01</floatArray>
|
|
</NASA>
|
|
</thermo>
|
|
<transport model="gas_transport">
|
|
<string title="geometry">nonlinear</string>
|
|
<LJ_welldepth units="K">312.600</LJ_welldepth>
|
|
<LJ_diameter units="A">4.600</LJ_diameter>
|
|
<dipoleMoment units="Debye">0.000</dipoleMoment>
|
|
<polarizability units="A3">0.000</polarizability>
|
|
<rotRelax>1.000</rotRelax>
|
|
</transport>
|
|
</species>
|
|
|
|
<!-- species SI3H8 -->
|
|
<species name="SI3H8">
|
|
<atomArray>H:8 Si:3 </atomArray>
|
|
<note>90784</note>
|
|
<thermo>
|
|
<NASA Tmax="1000.0" Tmin="300.0" P0="100000.0">
|
|
<floatArray name="coeffs" size="7">
|
|
7.719684600E-01, 6.344274000E-02, -7.672610900E-05, 5.454371500E-08,
|
|
-1.661172900E-11, 1.207126300E+04, 2.153250700E+01</floatArray>
|
|
</NASA>
|
|
<NASA Tmax="2000.0" Tmin="1000.0" P0="100000.0">
|
|
<floatArray name="coeffs" size="7">
|
|
6.093334100E+00, 3.658011200E-02, -2.389236100E-05, 7.627193200E-09,
|
|
-9.676938400E-13, 1.129720500E+04, -2.747565400E+00</floatArray>
|
|
</NASA>
|
|
</thermo>
|
|
<transport model="gas_transport">
|
|
<string title="geometry">nonlinear</string>
|
|
<LJ_welldepth units="K">331.200</LJ_welldepth>
|
|
<LJ_diameter units="A">5.560</LJ_diameter>
|
|
<dipoleMoment units="Debye">0.000</dipoleMoment>
|
|
<polarizability units="A3">0.000</polarizability>
|
|
<rotRelax>1.000</rotRelax>
|
|
</transport>
|
|
</species>
|
|
|
|
<!-- species SI2 -->
|
|
<species name="SI2">
|
|
<atomArray>Si:2 </atomArray>
|
|
<note>90784</note>
|
|
<thermo>
|
|
<NASA Tmax="1000.0" Tmin="300.0" P0="100000.0">
|
|
<floatArray name="coeffs" size="7">
|
|
2.967197600E+00, 6.311955800E-03, -1.097079000E-05, 8.927868000E-09,
|
|
-2.787368900E-12, 6.987073800E+04, 9.278950300E+00</floatArray>
|
|
</NASA>
|
|
<NASA Tmax="2000.0" Tmin="1000.0" P0="100000.0">
|
|
<floatArray name="coeffs" size="7">
|
|
4.144677900E+00, 6.523467700E-04, -5.010852000E-07, 1.806284300E-10,
|
|
-2.516111100E-14, 6.969470700E+04, 3.862736600E+00</floatArray>
|
|
</NASA>
|
|
</thermo>
|
|
<transport model="gas_transport">
|
|
<string title="geometry">linear</string>
|
|
<LJ_welldepth units="K">3036.000</LJ_welldepth>
|
|
<LJ_diameter units="A">3.280</LJ_diameter>
|
|
<dipoleMoment units="Debye">0.000</dipoleMoment>
|
|
<polarizability units="A3">0.000</polarizability>
|
|
<rotRelax>1.000</rotRelax>
|
|
</transport>
|
|
</species>
|
|
|
|
<!-- species SI3 -->
|
|
<species name="SI3">
|
|
<atomArray>Si:3 </atomArray>
|
|
<note>J 3/67</note>
|
|
<thermo>
|
|
<NASA Tmax="1000.0" Tmin="300.0" P0="100000.0">
|
|
<floatArray name="coeffs" size="7">
|
|
4.597912900E+00, 1.071527400E-02, -1.610042200E-05, 1.096920700E-08,
|
|
-2.783287500E-12, 7.476632400E+04, 3.442167100E+00</floatArray>
|
|
</NASA>
|
|
<NASA Tmax="5000.0" Tmin="1000.0" P0="100000.0">
|
|
<floatArray name="coeffs" size="7">
|
|
7.421336000E+00, -1.170994800E-04, 8.982077500E-08, 7.193596400E-12,
|
|
-2.567083700E-15, 7.414669900E+04, -1.036527400E+01</floatArray>
|
|
</NASA>
|
|
</thermo>
|
|
<transport model="gas_transport">
|
|
<string title="geometry">nonlinear</string>
|
|
<LJ_welldepth units="K">3036.000</LJ_welldepth>
|
|
<LJ_diameter units="A">3.550</LJ_diameter>
|
|
<dipoleMoment units="Debye">0.000</dipoleMoment>
|
|
<polarizability units="A3">0.000</polarizability>
|
|
<rotRelax>1.000</rotRelax>
|
|
</transport>
|
|
</species>
|
|
</speciesData>
|
|
<reactionData id="reaction_data">
|
|
|
|
<!-- reaction 0001 -->
|
|
<reaction reversible="yes" id="0001">
|
|
<equation>SIH4 + H [=] SIH3 + H2</equation>
|
|
<rateCoeff>
|
|
<Arrhenius>
|
|
<A>7.800000E+11</A>
|
|
<b>0</b>
|
|
<E units="cal/mol">2260.000000</E>
|
|
</Arrhenius>
|
|
</rateCoeff>
|
|
<reactants>SIH4:1.0 H:1</reactants>
|
|
<products>H2:1 SIH3:1.0</products>
|
|
</reaction>
|
|
|
|
<!-- reaction 0002 -->
|
|
<reaction reversible="yes" type="threeBody" id="0002">
|
|
<equation>SIH4 + M [=] SIH3 + H + M</equation>
|
|
<rateCoeff>
|
|
<Arrhenius>
|
|
<A>3.910000E+12</A>
|
|
<b>0</b>
|
|
<E units="cal/mol">89356.000000</E>
|
|
</Arrhenius>
|
|
</rateCoeff>
|
|
<reactants>SIH4:1.0</reactants>
|
|
<products>H:1 SIH3:1.0</products>
|
|
</reaction>
|
|
|
|
<!-- reaction 0003 -->
|
|
<reaction reversible="yes" id="0003">
|
|
<equation>SIH3 + H [=] SIH2 + H2</equation>
|
|
<rateCoeff>
|
|
<Arrhenius>
|
|
<A>7.800000E+11</A>
|
|
<b>0</b>
|
|
<E units="cal/mol">2260.000000</E>
|
|
</Arrhenius>
|
|
</rateCoeff>
|
|
<reactants>H:1 SIH3:1.0</reactants>
|
|
<products>H2:1 SIH2:1.0</products>
|
|
</reaction>
|
|
|
|
<!-- reaction 0004 -->
|
|
<reaction reversible="yes" type="threeBody" id="0004">
|
|
<equation>SI + SI + M [=] SI2 + M</equation>
|
|
<rateCoeff>
|
|
<Arrhenius>
|
|
<A>2.470000E+10</A>
|
|
<b>0</b>
|
|
<E units="cal/mol">1178.000000</E>
|
|
</Arrhenius>
|
|
</rateCoeff>
|
|
<reactants>SI:2.0</reactants>
|
|
<products>SI2:1.0</products>
|
|
</reaction>
|
|
|
|
<!-- reaction 0005 -->
|
|
<reaction reversible="yes" id="0005">
|
|
<equation>SIH4 + SIH2 [=] H3SISIH + H2</equation>
|
|
<rateCoeff>
|
|
<Arrhenius>
|
|
<A>1.300000E+10</A>
|
|
<b>0</b>
|
|
<E units="cal/mol">0.000000</E>
|
|
</Arrhenius>
|
|
</rateCoeff>
|
|
<reactants>SIH4:1.0 SIH2:1</reactants>
|
|
<products>H2:1 H3SISIH:1.0</products>
|
|
</reaction>
|
|
|
|
<!-- reaction 0006 -->
|
|
<reaction reversible="yes" id="0006">
|
|
<equation>SIH + H2 [=] SIH2 + H</equation>
|
|
<rateCoeff>
|
|
<Arrhenius>
|
|
<A>4.800000E+11</A>
|
|
<b>0</b>
|
|
<E units="cal/mol">23.640000</E>
|
|
</Arrhenius>
|
|
</rateCoeff>
|
|
<reactants>H2:1 SIH:1.0</reactants>
|
|
<products>H:1 SIH2:1.0</products>
|
|
</reaction>
|
|
|
|
<!-- reaction 0007 -->
|
|
<reaction reversible="yes" id="0007">
|
|
<equation>SIH + SIH4 [=] H3SISIH + H</equation>
|
|
<rateCoeff>
|
|
<Arrhenius>
|
|
<A>1.600000E+11</A>
|
|
<b>0</b>
|
|
<E units="cal/mol">0.000000</E>
|
|
</Arrhenius>
|
|
</rateCoeff>
|
|
<reactants>SIH4:1 SIH:1.0</reactants>
|
|
<products>H:1 H3SISIH:1.0</products>
|
|
</reaction>
|
|
|
|
<!-- reaction 0008 -->
|
|
<reaction reversible="yes" id="0008">
|
|
<equation>SI + H2 [=] SIH + H</equation>
|
|
<rateCoeff>
|
|
<Arrhenius>
|
|
<A>1.500000E+12</A>
|
|
<b>0</b>
|
|
<E units="cal/mol">31.800000</E>
|
|
</Arrhenius>
|
|
</rateCoeff>
|
|
<reactants>H2:1 SI:1.0</reactants>
|
|
<products>H:1 SIH:1.0</products>
|
|
</reaction>
|
|
|
|
<!-- reaction 0009 -->
|
|
<reaction reversible="yes" type="falloff" id="0009">
|
|
<equation>SIH4 (+ M) [=] SIH2 + H2 (+ M)</equation>
|
|
<rateCoeff>
|
|
<Arrhenius>
|
|
<A>3.119000E+09</A>
|
|
<b>1.669</b>
|
|
<E units="cal/mol">54710.000000</E>
|
|
</Arrhenius>
|
|
<Arrhenius name="k0">
|
|
<A>5.214000E+26</A>
|
|
<b>-3.5449999999999999</b>
|
|
<E units="cal/mol">57550.000000</E>
|
|
</Arrhenius>
|
|
<efficiencies default="1.0">SI2H6:4 SIH4:4 </efficiencies>
|
|
<falloff type="Troe">-0.4984 888.3 209.4 2760 </falloff>
|
|
</rateCoeff>
|
|
<reactants>SIH4:1.0</reactants>
|
|
<products>H2:1 SIH2:1.0</products>
|
|
</reaction>
|
|
|
|
<!-- reaction 0010 -->
|
|
<reaction reversible="yes" type="falloff" id="0010">
|
|
<equation>H3SISIH (+ M) [=] H2SISIH2 (+ M)</equation>
|
|
<rateCoeff>
|
|
<Arrhenius>
|
|
<A>2.540000E+13</A>
|
|
<b>-0.22389999999999999</b>
|
|
<E units="cal/mol">5381.000000</E>
|
|
</Arrhenius>
|
|
<Arrhenius name="k0">
|
|
<A>1.099000E+30</A>
|
|
<b>-5.7649999999999997</b>
|
|
<E units="cal/mol">9152.000000</E>
|
|
</Arrhenius>
|
|
<efficiencies default="1.0">SI2H6:4 SIH4:4 </efficiencies>
|
|
<falloff type="Troe">-0.4202 214.5 103 136.3 </falloff>
|
|
</rateCoeff>
|
|
<reactants>H3SISIH:1.0</reactants>
|
|
<products>H2SISIH2:1.0</products>
|
|
</reaction>
|
|
|
|
<!-- reaction 0011 -->
|
|
<reaction reversible="yes" type="falloff" id="0011">
|
|
<equation>SI3H8 (+ M) [=] SIH4 + H3SISIH (+ M)</equation>
|
|
<rateCoeff>
|
|
<Arrhenius>
|
|
<A>3.730000E+12</A>
|
|
<b>0.99199999999999999</b>
|
|
<E units="cal/mol">50850.000000</E>
|
|
</Arrhenius>
|
|
<Arrhenius name="k0">
|
|
<A>4.360000E+73</A>
|
|
<b>-17.260000000000002</b>
|
|
<E units="cal/mol">59303.000000</E>
|
|
</Arrhenius>
|
|
<efficiencies default="1.0">SI2H6:4 SIH4:4 </efficiencies>
|
|
<falloff type="Troe">0.4157 365.3 3102 9.724 </falloff>
|
|
</rateCoeff>
|
|
<reactants>SI3H8:1.0</reactants>
|
|
<products>SIH4:1.0 H3SISIH:1</products>
|
|
</reaction>
|
|
|
|
<!-- reaction 0012 -->
|
|
<reaction reversible="yes" type="falloff" id="0012">
|
|
<equation>SI3H8 (+ M) [=] SIH2 + SI2H6 (+ M)</equation>
|
|
<rateCoeff>
|
|
<Arrhenius>
|
|
<A>6.970000E+12</A>
|
|
<b>0.96909999999999996</b>
|
|
<E units="cal/mol">52677.000000</E>
|
|
</Arrhenius>
|
|
<Arrhenius name="k0">
|
|
<A>1.730000E+66</A>
|
|
<b>-15.07</b>
|
|
<E units="cal/mol">60491.000000</E>
|
|
</Arrhenius>
|
|
<efficiencies default="1.0">SI2H6:4 SIH4:4 </efficiencies>
|
|
<falloff type="Troe">-3.47e-05 442 2412 128.3 </falloff>
|
|
</rateCoeff>
|
|
<reactants>SI3H8:1.0</reactants>
|
|
<products>SI2H6:1 SIH2:1.0</products>
|
|
</reaction>
|
|
|
|
<!-- reaction 0013 -->
|
|
<reaction reversible="yes" type="falloff" id="0013">
|
|
<equation>SI2H6 (+ M) [=] H2 + H3SISIH (+ M)</equation>
|
|
<rateCoeff>
|
|
<Arrhenius>
|
|
<A>9.086000E+09</A>
|
|
<b>1.8340000000000001</b>
|
|
<E units="cal/mol">54197.000000</E>
|
|
</Arrhenius>
|
|
<Arrhenius name="k0">
|
|
<A>1.945000E+41</A>
|
|
<b>-7.7720000000000002</b>
|
|
<E units="cal/mol">59023.000000</E>
|
|
</Arrhenius>
|
|
<efficiencies default="1.0">SI2H6:4 SIH4:4 </efficiencies>
|
|
<falloff type="Troe">-0.1224 793.3 2400 11.39 </falloff>
|
|
</rateCoeff>
|
|
<reactants>SI2H6:1.0</reactants>
|
|
<products>H2:1.0 H3SISIH:1</products>
|
|
</reaction>
|
|
|
|
<!-- reaction 0014 -->
|
|
<reaction reversible="yes" type="falloff" id="0014">
|
|
<equation>SI2H6 (+ M) [=] SIH4 + SIH2 (+ M)</equation>
|
|
<rateCoeff>
|
|
<Arrhenius>
|
|
<A>1.810000E+10</A>
|
|
<b>1.7470000000000001</b>
|
|
<E units="cal/mol">50203.000000</E>
|
|
</Arrhenius>
|
|
<Arrhenius name="k0">
|
|
<A>5.090000E+50</A>
|
|
<b>-10.369999999999999</b>
|
|
<E units="cal/mol">56034.000000</E>
|
|
</Arrhenius>
|
|
<efficiencies default="1.0">SI2H6:4 SIH4:4 </efficiencies>
|
|
<falloff type="Troe">4.375e-05 438.5 2726 438.2 </falloff>
|
|
</rateCoeff>
|
|
<reactants>SI2H6:1.0</reactants>
|
|
<products>SIH4:1.0 SIH2:1</products>
|
|
</reaction>
|
|
</reactionData>
|
|
</ctml>
|