300 1 H2:1.0 Si H He H2 H HE SIH4 SI SIH SIH2 SIH3 H3SISIH SI2H6 H2SISIH2 SI3H8 SI2 SI3 TPIS78 H:2 0.000000000E+00 2.344331120E+00, 7.980520750E-03, -1.947815100E-05, 2.015720940E-08, -7.376117610E-12, -9.179351730E+02, 6.830102380E-01 3.337279200E+00, -4.940247310E-05, 4.994567780E-07, -1.795663940E-10, 2.002553760E-14, -9.501589220E+02, -3.205023310E+00 L 7/88 H:1 0.000000000E+00 2.500000000E+00, 7.053328190E-13, -1.995919640E-15, 2.300816320E-18, -9.277323320E-22, 2.547365990E+04, -4.466828530E-01 2.500000010E+00, -2.308429730E-11, 1.615619480E-14, -4.735152350E-18, 4.981973570E-22, 2.547365990E+04, -4.466829140E-01 120186 He:1 0.000000000E+00 2.500000000E+00, 0.000000000E+00, 0.000000000E+00, 0.000000000E+00, 0.000000000E+00, -7.453750000E+02, 9.153488000E-01 2.500000000E+00, 0.000000000E+00, 0.000000000E+00, 0.000000000E+00, 0.000000000E+00, -7.453750000E+02, 9.153489000E-01 90784 Si:1 H:4 0.000000000E+00 1.451640400E+00, 1.398736300E-02, -4.234563900E-06, -2.360614200E-09, 1.371208900E-12, 3.113410500E+03, 1.232185500E+01 7.935938000E-01, 1.767189900E-02, -1.139800900E-05, 3.599260400E-09, -4.524157100E-13, 3.198212700E+03, 1.524225700E+01 J 3/67 Si:1 0.000000000E+00 3.179353700E+00, -2.764699200E-03, 4.478403800E-06, -3.283317700E-09, 9.121363100E-13, 5.333903200E+04, 2.727320400E+00 2.650601400E+00, -3.576385200E-04, 2.959229300E-07, -7.280482900E-11, 5.796332900E-15, 5.343705400E+04, 5.220405700E+00 121986 Si:1 H:1 0.000000000E+00 3.836010000E+00, -2.702657000E-03, 6.849070000E-06, -5.424184000E-09, 1.472131000E-12, 4.507593000E+04, 9.350778000E-01 3.110430000E+00, 1.094946000E-03, 2.898629000E-08, -2.745104000E-10, 7.051799000E-14, 4.516898000E+04, 4.193487000E+00 42489 Si:1 H:2 0.000000000E+00 3.475092000E+00, 2.139338000E-03, 7.672306000E-07, 5.217668000E-10, -9.898824000E-13, 3.147397000E+04, 4.436585000E+00 4.142390000E+00, 2.150191000E-03, -2.190730000E-07, -2.073725000E-10, 4.741018000E-14, 3.110484000E+04, 2.930745000E-01 42489 Si:1 H:3 0.000000000E+00 2.946733000E+00, 6.466764000E-03, 5.991653000E-07, -2.218413000E-09, 3.052670000E-13, 2.270173000E+04, 7.347948000E+00 5.015906000E+00, 3.732750000E-03, -3.609053000E-07, -3.729193000E-10, 8.468490000E-14, 2.190233000E+04, -4.291368000E+00 111191 H:4 Si:2 0.000000000E+00 3.698707000E+00, 1.870180000E-02, -1.430704000E-05, 6.005836000E-09, -1.116293000E-12, 3.590825000E+04, 8.825191000E+00 1.127202000E+01, 2.538145000E-03, -2.998472000E-07, -9.465367000E-11, 1.855053000E-14, 3.297169000E+04, -3.264598000E+01 90784 Si:2 H:6 0.000000000E+00 6.734798300E-01, 4.093153100E-02, -4.484125500E-05, 2.995223200E-08, -8.901085400E-12, 7.932787500E+03, 1.862740300E+01 3.407493600E+00, 2.720647900E-02, -1.771320400E-05, 5.639117700E-09, -7.137868200E-13, 7.532184200E+03, 6.132175400E+00 42489 Si:2 H:4 0.000000000E+00 5.133186000E+00, 1.252855000E-02, -4.620421000E-07, -6.606075000E-09, 2.864345000E-12, 2.956915000E+04, 7.605133000E-01 8.986817000E+00, 5.405047000E-03, -5.214022000E-07, -5.313742000E-10, 1.188727000E-13, 2.832748000E+04, -2.004478000E+01 90784 Si:3 H:8 0.000000000E+00 7.719684600E-01, 6.344274000E-02, -7.672610900E-05, 5.454371500E-08, -1.661172900E-11, 1.207126300E+04, 2.153250700E+01 6.093334100E+00, 3.658011200E-02, -2.389236100E-05, 7.627193200E-09, -9.676938400E-13, 1.129720500E+04, -2.747565400E+00 90784 Si:2 0.000000000E+00 2.967197600E+00, 6.311955800E-03, -1.097079000E-05, 8.927868000E-09, -2.787368900E-12, 6.987073800E+04, 9.278950300E+00 4.144677900E+00, 6.523467700E-04, -5.010852000E-07, 1.806284300E-10, -2.516111100E-14, 6.969470700E+04, 3.862736600E+00 J 3/67 Si:3 0.000000000E+00 4.597912900E+00, 1.071527400E-02, -1.610042200E-05, 1.096920700E-08, -2.783287500E-12, 7.476632400E+04, 3.442167100E+00 7.421336000E+00, -1.170994800E-04, 8.982077500E-08, 7.193596400E-12, -2.567083700E-15, 7.414669900E+04, -1.036527400E+01 SIH4 + H [=] SIH3 + H2 SIH4:1 H:1 SIH3:1 H2:1 7.800000000E+14 0.000000000E+00 2.260000000E+03 SIH4 + M [=] SIH3 + H + M SIH4:1 SIH3:1 H:1 3.910000000E+15 0.000000000E+00 8.935600000E+04 SIH3 + H [=] SIH2 + H2 SIH3:1 H:1 SIH2:1 H2:1 7.800000000E+14 0.000000000E+00 2.260000000E+03 SI + SI + M [=] SI2 + M SI:1 SI:1 SI2:1 2.470000000E+16 0.000000000E+00 1.178000000E+03 SIH4 + SIH2 [=] H3SISIH + H2 SIH4:1 SIH2:1 H3SISIH:1 H2:1 1.300000000E+13 0.000000000E+00 0.000000000E+00 SIH + H2 [=] SIH2 + H SIH:1 H2:1 SIH2:1 H:1 4.800000000E+14 0.000000000E+00 2.364000000E+01 SIH + SIH4 [=] H3SISIH + H SIH:1 SIH4:1 H3SISIH:1 H:1 1.600000000E+14 0.000000000E+00 0.000000000E+00 SI + H2 [=] SIH + H SI:1 H2:1 SIH:1 H:1 1.500000000E+15 0.000000000E+00 3.180000000E+01 SIH4 (+ M) [=] SIH2 + H2 (+ M) SIH4:1 SIH2:1 H2:1 3.119000000E+09 1.669000000E+00 5.471000000E+04 5.214000000E+29 -3.545000000E+00 5.755000000E+04 -0.4984 888.3 209.4 2760 SI2H6:4 SIH4:4 H3SISIH (+ M) [=] H2SISIH2 (+ M) H3SISIH:1 H2SISIH2:1 2.540000000E+13 -2.239000000E-01 5.381000000E+03 1.099000000E+33 -5.765000000E+00 9.152000000E+03 -0.4202 214.5 103 136.3 SI2H6:4 SIH4:4 SI3H8 (+ M) [=] SIH4 + H3SISIH (+ M) SI3H8:1 SIH4:1 H3SISIH:1 3.730000000E+12 9.920000000E-01 5.085000000E+04 4.360000000E+76 -1.726000000E+01 5.930300000E+04 0.4157 365.3 3102 9.724 SI2H6:4 SIH4:4 SI3H8 (+ M) [=] SIH2 + SI2H6 (+ M) SI3H8:1 SIH2:1 SI2H6:1 6.970000000E+12 9.691000000E-01 5.267700000E+04 1.730000000E+69 -1.507000000E+01 6.049100000E+04 -3.47e-05 442 2412 128.3 SI2H6:4 SIH4:4 SI2H6 (+ M) [=] H2 + H3SISIH (+ M) SI2H6:1 H2:1 H3SISIH:1 9.086000000E+09 1.834000000E+00 5.419700000E+04 1.945000000E+44 -7.772000000E+00 5.902300000E+04 -0.1224 793.3 2400 11.39 SI2H6:4 SIH4:4 SI2H6 (+ M) [=] SIH4 + SIH2 (+ M) SI2H6:1 SIH4:1 SIH2:1 1.810000000E+10 1.747000000E+00 5.020300000E+04 5.090000000E+53 -1.037000000E+01 5.603400000E+04 4.375e-05 438.5 2726 438.2 SI2H6:4 SIH4:4