<?xml version="1.0"?>
<ctml>
  <validate reactions="yes" species="yes"/>

  <!-- phase silane     -->
  <phase dim="3" id="silane">
    <elementArray datasrc="elements.xml">Si  H  He </elementArray>
    <speciesArray datasrc="#species_data">
      H2  H  HE  SIH4  SI  SIH  SIH2  SIH3  H3SISIH  SI2H6 
      H2SISIH2  SI3H8  SI2  SI3 </speciesArray>
    <reactionArray datasrc="#reaction_data"/>
    <state>
      <temperature units="K">300.0</temperature>
      <pressure units="Pa">101325.0</pressure>
    </state>
    <thermo model="IdealGas"/>
    <kinetics model="GasKinetics"/>
    <transport model="Mix"/>
  </phase>

  <!-- species definitions     -->
  <speciesData id="species_data">

    <!-- species H2    -->
    <species name="H2">
      <atomArray>H:2 </atomArray>
      <note>TPIS78</note>
      <thermo>
        <NASA Tmax="1000.0" Tmin="200.0" P0="100000.0">
           <floatArray name="coeffs" size="7">
             2.344331120E+00,   7.980520750E-03,  -1.947815100E-05,   2.015720940E-08, 
             -7.376117610E-12,  -9.179351730E+02,   6.830102380E-01</floatArray>
        </NASA>
        <NASA Tmax="3500.0" Tmin="1000.0" P0="100000.0">
           <floatArray name="coeffs" size="7">
             3.337279200E+00,  -4.940247310E-05,   4.994567780E-07,  -1.795663940E-10, 
             2.002553760E-14,  -9.501589220E+02,  -3.205023310E+00</floatArray>
        </NASA>
      </thermo>
      <transport model="gas_transport">
        <string title="geometry">linear</string>
        <LJ_welldepth units="K">38.000</LJ_welldepth>
        <LJ_diameter units="A">2.920</LJ_diameter>
        <dipoleMoment units="Debye">0.000</dipoleMoment>
        <polarizability units="A3">0.790</polarizability>
        <rotRelax>280.000</rotRelax>
      </transport>
    </species>

    <!-- species H    -->
    <species name="H">
      <atomArray>H:1 </atomArray>
      <note>L 7/88</note>
      <thermo>
        <NASA Tmax="1000.0" Tmin="200.0" P0="100000.0">
           <floatArray name="coeffs" size="7">
             2.500000000E+00,   7.053328190E-13,  -1.995919640E-15,   2.300816320E-18, 
             -9.277323320E-22,   2.547365990E+04,  -4.466828530E-01</floatArray>
        </NASA>
        <NASA Tmax="3500.0" Tmin="1000.0" P0="100000.0">
           <floatArray name="coeffs" size="7">
             2.500000010E+00,  -2.308429730E-11,   1.615619480E-14,  -4.735152350E-18, 
             4.981973570E-22,   2.547365990E+04,  -4.466829140E-01</floatArray>
        </NASA>
      </thermo>
      <transport model="gas_transport">
        <string title="geometry">atom</string>
        <LJ_welldepth units="K">145.000</LJ_welldepth>
        <LJ_diameter units="A">2.050</LJ_diameter>
        <dipoleMoment units="Debye">0.000</dipoleMoment>
        <polarizability units="A3">0.000</polarizability>
        <rotRelax>0.000</rotRelax>
      </transport>
    </species>

    <!-- species HE    -->
    <species name="HE">
      <atomArray>He:1 </atomArray>
      <note>120186</note>
      <thermo>
        <NASA Tmax="1000.0" Tmin="300.0" P0="100000.0">
           <floatArray name="coeffs" size="7">
             2.500000000E+00,   0.000000000E+00,   0.000000000E+00,   0.000000000E+00, 
             0.000000000E+00,  -7.453750000E+02,   9.153488000E-01</floatArray>
        </NASA>
        <NASA Tmax="5000.0" Tmin="1000.0" P0="100000.0">
           <floatArray name="coeffs" size="7">
             2.500000000E+00,   0.000000000E+00,   0.000000000E+00,   0.000000000E+00, 
             0.000000000E+00,  -7.453750000E+02,   9.153489000E-01</floatArray>
        </NASA>
      </thermo>
      <transport model="gas_transport">
        <string title="geometry">atom</string>
        <LJ_welldepth units="K">10.200</LJ_welldepth>
        <LJ_diameter units="A">2.580</LJ_diameter>
        <dipoleMoment units="Debye">0.000</dipoleMoment>
        <polarizability units="A3">0.000</polarizability>
        <rotRelax>0.000</rotRelax>
      </transport>
    </species>

    <!-- species SIH4    -->
    <species name="SIH4">
      <atomArray>H:4 Si:1 </atomArray>
      <note>90784</note>
      <thermo>
        <NASA Tmax="1000.0" Tmin="300.0" P0="100000.0">
           <floatArray name="coeffs" size="7">
             1.451640400E+00,   1.398736300E-02,  -4.234563900E-06,  -2.360614200E-09, 
             1.371208900E-12,   3.113410500E+03,   1.232185500E+01</floatArray>
        </NASA>
        <NASA Tmax="2000.0" Tmin="1000.0" P0="100000.0">
           <floatArray name="coeffs" size="7">
             7.935938000E-01,   1.767189900E-02,  -1.139800900E-05,   3.599260400E-09, 
             -4.524157100E-13,   3.198212700E+03,   1.524225700E+01</floatArray>
        </NASA>
      </thermo>
      <transport model="gas_transport">
        <string title="geometry">nonlinear</string>
        <LJ_welldepth units="K">207.600</LJ_welldepth>
        <LJ_diameter units="A">4.080</LJ_diameter>
        <dipoleMoment units="Debye">0.000</dipoleMoment>
        <polarizability units="A3">0.000</polarizability>
        <rotRelax>1.000</rotRelax>
      </transport>
    </species>

    <!-- species SI    -->
    <species name="SI">
      <atomArray>Si:1 </atomArray>
      <note>J 3/67</note>
      <thermo>
        <NASA Tmax="1000.0" Tmin="300.0" P0="100000.0">
           <floatArray name="coeffs" size="7">
             3.179353700E+00,  -2.764699200E-03,   4.478403800E-06,  -3.283317700E-09, 
             9.121363100E-13,   5.333903200E+04,   2.727320400E+00</floatArray>
        </NASA>
        <NASA Tmax="5000.0" Tmin="1000.0" P0="100000.0">
           <floatArray name="coeffs" size="7">
             2.650601400E+00,  -3.576385200E-04,   2.959229300E-07,  -7.280482900E-11, 
             5.796332900E-15,   5.343705400E+04,   5.220405700E+00</floatArray>
        </NASA>
      </thermo>
      <transport model="gas_transport">
        <string title="geometry">atom</string>
        <LJ_welldepth units="K">3036.000</LJ_welldepth>
        <LJ_diameter units="A">2.910</LJ_diameter>
        <dipoleMoment units="Debye">0.000</dipoleMoment>
        <polarizability units="A3">0.000</polarizability>
        <rotRelax>0.000</rotRelax>
      </transport>
    </species>

    <!-- species SIH    -->
    <species name="SIH">
      <atomArray>H:1 Si:1 </atomArray>
      <note>121986</note>
      <thermo>
        <NASA Tmax="1000.0" Tmin="300.0" P0="100000.0">
           <floatArray name="coeffs" size="7">
             3.836010000E+00,  -2.702657000E-03,   6.849070000E-06,  -5.424184000E-09, 
             1.472131000E-12,   4.507593000E+04,   9.350778000E-01</floatArray>
        </NASA>
        <NASA Tmax="2000.0" Tmin="1000.0" P0="100000.0">
           <floatArray name="coeffs" size="7">
             3.110430000E+00,   1.094946000E-03,   2.898629000E-08,  -2.745104000E-10, 
             7.051799000E-14,   4.516898000E+04,   4.193487000E+00</floatArray>
        </NASA>
      </thermo>
      <transport model="gas_transport">
        <string title="geometry">linear</string>
        <LJ_welldepth units="K">95.800</LJ_welldepth>
        <LJ_diameter units="A">3.660</LJ_diameter>
        <dipoleMoment units="Debye">0.000</dipoleMoment>
        <polarizability units="A3">0.000</polarizability>
        <rotRelax>1.000</rotRelax>
      </transport>
    </species>

    <!-- species SIH2    -->
    <species name="SIH2">
      <atomArray>H:2 Si:1 </atomArray>
      <note>42489</note>
      <thermo>
        <NASA Tmax="1000.0" Tmin="300.0" P0="100000.0">
           <floatArray name="coeffs" size="7">
             3.475092000E+00,   2.139338000E-03,   7.672306000E-07,   5.217668000E-10, 
             -9.898824000E-13,   3.147397000E+04,   4.436585000E+00</floatArray>
        </NASA>
        <NASA Tmax="3000.0" Tmin="1000.0" P0="100000.0">
           <floatArray name="coeffs" size="7">
             4.142390000E+00,   2.150191000E-03,  -2.190730000E-07,  -2.073725000E-10, 
             4.741018000E-14,   3.110484000E+04,   2.930745000E-01</floatArray>
        </NASA>
      </thermo>
      <transport model="gas_transport">
        <string title="geometry">nonlinear</string>
        <LJ_welldepth units="K">133.100</LJ_welldepth>
        <LJ_diameter units="A">3.800</LJ_diameter>
        <dipoleMoment units="Debye">0.000</dipoleMoment>
        <polarizability units="A3">0.000</polarizability>
        <rotRelax>1.000</rotRelax>
      </transport>
    </species>

    <!-- species SIH3    -->
    <species name="SIH3">
      <atomArray>H:3 Si:1 </atomArray>
      <note>42489</note>
      <thermo>
        <NASA Tmax="1000.0" Tmin="300.0" P0="100000.0">
           <floatArray name="coeffs" size="7">
             2.946733000E+00,   6.466764000E-03,   5.991653000E-07,  -2.218413000E-09, 
             3.052670000E-13,   2.270173000E+04,   7.347948000E+00</floatArray>
        </NASA>
        <NASA Tmax="3000.0" Tmin="1000.0" P0="100000.0">
           <floatArray name="coeffs" size="7">
             5.015906000E+00,   3.732750000E-03,  -3.609053000E-07,  -3.729193000E-10, 
             8.468490000E-14,   2.190233000E+04,  -4.291368000E+00</floatArray>
        </NASA>
      </thermo>
      <transport model="gas_transport">
        <string title="geometry">nonlinear</string>
        <LJ_welldepth units="K">170.300</LJ_welldepth>
        <LJ_diameter units="A">3.940</LJ_diameter>
        <dipoleMoment units="Debye">0.000</dipoleMoment>
        <polarizability units="A3">0.000</polarizability>
        <rotRelax>1.000</rotRelax>
      </transport>
    </species>

    <!-- species H3SISIH    -->
    <species name="H3SISIH">
      <atomArray>H:4 Si:2 </atomArray>
      <note>111191</note>
      <thermo>
        <NASA Tmax="1500.0" Tmin="300.0" P0="100000.0">
           <floatArray name="coeffs" size="7">
             3.698707000E+00,   1.870180000E-02,  -1.430704000E-05,   6.005836000E-09, 
             -1.116293000E-12,   3.590825000E+04,   8.825191000E+00</floatArray>
        </NASA>
        <NASA Tmax="4000.0" Tmin="1500.0" P0="100000.0">
           <floatArray name="coeffs" size="7">
             1.127202000E+01,   2.538145000E-03,  -2.998472000E-07,  -9.465367000E-11, 
             1.855053000E-14,   3.297169000E+04,  -3.264598000E+01</floatArray>
        </NASA>
      </thermo>
      <transport model="gas_transport">
        <string title="geometry">nonlinear</string>
        <LJ_welldepth units="K">312.600</LJ_welldepth>
        <LJ_diameter units="A">4.600</LJ_diameter>
        <dipoleMoment units="Debye">0.000</dipoleMoment>
        <polarizability units="A3">0.000</polarizability>
        <rotRelax>1.000</rotRelax>
      </transport>
    </species>

    <!-- species SI2H6    -->
    <species name="SI2H6">
      <atomArray>H:6 Si:2 </atomArray>
      <note>90784</note>
      <thermo>
        <NASA Tmax="1000.0" Tmin="300.0" P0="100000.0">
           <floatArray name="coeffs" size="7">
             6.734798300E-01,   4.093153100E-02,  -4.484125500E-05,   2.995223200E-08, 
             -8.901085400E-12,   7.932787500E+03,   1.862740300E+01</floatArray>
        </NASA>
        <NASA Tmax="2000.0" Tmin="1000.0" P0="100000.0">
           <floatArray name="coeffs" size="7">
             3.407493600E+00,   2.720647900E-02,  -1.771320400E-05,   5.639117700E-09, 
             -7.137868200E-13,   7.532184200E+03,   6.132175400E+00</floatArray>
        </NASA>
      </thermo>
      <transport model="gas_transport">
        <string title="geometry">nonlinear</string>
        <LJ_welldepth units="K">301.300</LJ_welldepth>
        <LJ_diameter units="A">4.830</LJ_diameter>
        <dipoleMoment units="Debye">0.000</dipoleMoment>
        <polarizability units="A3">0.000</polarizability>
        <rotRelax>1.000</rotRelax>
      </transport>
    </species>

    <!-- species H2SISIH2    -->
    <species name="H2SISIH2">
      <atomArray>H:4 Si:2 </atomArray>
      <note>42489</note>
      <thermo>
        <NASA Tmax="1000.0" Tmin="300.0" P0="100000.0">
           <floatArray name="coeffs" size="7">
             5.133186000E+00,   1.252855000E-02,  -4.620421000E-07,  -6.606075000E-09, 
             2.864345000E-12,   2.956915000E+04,   7.605133000E-01</floatArray>
        </NASA>
        <NASA Tmax="3000.0" Tmin="1000.0" P0="100000.0">
           <floatArray name="coeffs" size="7">
             8.986817000E+00,   5.405047000E-03,  -5.214022000E-07,  -5.313742000E-10, 
             1.188727000E-13,   2.832748000E+04,  -2.004478000E+01</floatArray>
        </NASA>
      </thermo>
      <transport model="gas_transport">
        <string title="geometry">nonlinear</string>
        <LJ_welldepth units="K">312.600</LJ_welldepth>
        <LJ_diameter units="A">4.600</LJ_diameter>
        <dipoleMoment units="Debye">0.000</dipoleMoment>
        <polarizability units="A3">0.000</polarizability>
        <rotRelax>1.000</rotRelax>
      </transport>
    </species>

    <!-- species SI3H8    -->
    <species name="SI3H8">
      <atomArray>H:8 Si:3 </atomArray>
      <note>90784</note>
      <thermo>
        <NASA Tmax="1000.0" Tmin="300.0" P0="100000.0">
           <floatArray name="coeffs" size="7">
             7.719684600E-01,   6.344274000E-02,  -7.672610900E-05,   5.454371500E-08, 
             -1.661172900E-11,   1.207126300E+04,   2.153250700E+01</floatArray>
        </NASA>
        <NASA Tmax="2000.0" Tmin="1000.0" P0="100000.0">
           <floatArray name="coeffs" size="7">
             6.093334100E+00,   3.658011200E-02,  -2.389236100E-05,   7.627193200E-09, 
             -9.676938400E-13,   1.129720500E+04,  -2.747565400E+00</floatArray>
        </NASA>
      </thermo>
      <transport model="gas_transport">
        <string title="geometry">nonlinear</string>
        <LJ_welldepth units="K">331.200</LJ_welldepth>
        <LJ_diameter units="A">5.560</LJ_diameter>
        <dipoleMoment units="Debye">0.000</dipoleMoment>
        <polarizability units="A3">0.000</polarizability>
        <rotRelax>1.000</rotRelax>
      </transport>
    </species>

    <!-- species SI2    -->
    <species name="SI2">
      <atomArray>Si:2 </atomArray>
      <note>90784</note>
      <thermo>
        <NASA Tmax="1000.0" Tmin="300.0" P0="100000.0">
           <floatArray name="coeffs" size="7">
             2.967197600E+00,   6.311955800E-03,  -1.097079000E-05,   8.927868000E-09, 
             -2.787368900E-12,   6.987073800E+04,   9.278950300E+00</floatArray>
        </NASA>
        <NASA Tmax="2000.0" Tmin="1000.0" P0="100000.0">
           <floatArray name="coeffs" size="7">
             4.144677900E+00,   6.523467700E-04,  -5.010852000E-07,   1.806284300E-10, 
             -2.516111100E-14,   6.969470700E+04,   3.862736600E+00</floatArray>
        </NASA>
      </thermo>
      <transport model="gas_transport">
        <string title="geometry">linear</string>
        <LJ_welldepth units="K">3036.000</LJ_welldepth>
        <LJ_diameter units="A">3.280</LJ_diameter>
        <dipoleMoment units="Debye">0.000</dipoleMoment>
        <polarizability units="A3">0.000</polarizability>
        <rotRelax>1.000</rotRelax>
      </transport>
    </species>

    <!-- species SI3    -->
    <species name="SI3">
      <atomArray>Si:3 </atomArray>
      <note>J 3/67</note>
      <thermo>
        <NASA Tmax="1000.0" Tmin="300.0" P0="100000.0">
           <floatArray name="coeffs" size="7">
             4.597912900E+00,   1.071527400E-02,  -1.610042200E-05,   1.096920700E-08, 
             -2.783287500E-12,   7.476632400E+04,   3.442167100E+00</floatArray>
        </NASA>
        <NASA Tmax="5000.0" Tmin="1000.0" P0="100000.0">
           <floatArray name="coeffs" size="7">
             7.421336000E+00,  -1.170994800E-04,   8.982077500E-08,   7.193596400E-12, 
             -2.567083700E-15,   7.414669900E+04,  -1.036527400E+01</floatArray>
        </NASA>
      </thermo>
      <transport model="gas_transport">
        <string title="geometry">nonlinear</string>
        <LJ_welldepth units="K">3036.000</LJ_welldepth>
        <LJ_diameter units="A">3.550</LJ_diameter>
        <dipoleMoment units="Debye">0.000</dipoleMoment>
        <polarizability units="A3">0.000</polarizability>
        <rotRelax>1.000</rotRelax>
      </transport>
    </species>
  </speciesData>
  <reactionData id="reaction_data">

    <!-- reaction 0001    -->
    <reaction reversible="yes" id="0001">
      <equation>SIH4 + H [=] SIH3 + H2</equation>
      <rateCoeff>
        <Arrhenius>
           <A>7.800000E+11</A>
           <b>0</b>
           <E units="cal/mol">2260.000000</E>
        </Arrhenius>
      </rateCoeff>
      <reactants>SIH4:1.0 H:1</reactants>
      <products>H2:1 SIH3:1.0</products>
    </reaction>

    <!-- reaction 0002    -->
    <reaction reversible="yes" type="threeBody" id="0002">
      <equation>SIH4 + M [=] SIH3 + H + M</equation>
      <rateCoeff>
        <Arrhenius>
           <A>3.910000E+12</A>
           <b>0</b>
           <E units="cal/mol">89356.000000</E>
        </Arrhenius>
      </rateCoeff>
      <reactants>SIH4:1.0</reactants>
      <products>H:1 SIH3:1.0</products>
    </reaction>

    <!-- reaction 0003    -->
    <reaction reversible="yes" id="0003">
      <equation>SIH3 + H [=] SIH2 + H2</equation>
      <rateCoeff>
        <Arrhenius>
           <A>7.800000E+11</A>
           <b>0</b>
           <E units="cal/mol">2260.000000</E>
        </Arrhenius>
      </rateCoeff>
      <reactants>H:1 SIH3:1.0</reactants>
      <products>H2:1 SIH2:1.0</products>
    </reaction>

    <!-- reaction 0004    -->
    <reaction reversible="yes" type="threeBody" id="0004">
      <equation>SI + SI + M [=] SI2 + M</equation>
      <rateCoeff>
        <Arrhenius>
           <A>2.470000E+10</A>
           <b>0</b>
           <E units="cal/mol">1178.000000</E>
        </Arrhenius>
      </rateCoeff>
      <reactants>SI:2.0</reactants>
      <products>SI2:1.0</products>
    </reaction>

    <!-- reaction 0005    -->
    <reaction reversible="yes" id="0005">
      <equation>SIH4 + SIH2 [=] H3SISIH + H2</equation>
      <rateCoeff>
        <Arrhenius>
           <A>1.300000E+10</A>
           <b>0</b>
           <E units="cal/mol">0.000000</E>
        </Arrhenius>
      </rateCoeff>
      <reactants>SIH4:1.0 SIH2:1</reactants>
      <products>H2:1 H3SISIH:1.0</products>
    </reaction>

    <!-- reaction 0006    -->
    <reaction reversible="yes" id="0006">
      <equation>SIH + H2 [=] SIH2 + H</equation>
      <rateCoeff>
        <Arrhenius>
           <A>4.800000E+11</A>
           <b>0</b>
           <E units="cal/mol">23.640000</E>
        </Arrhenius>
      </rateCoeff>
      <reactants>H2:1 SIH:1.0</reactants>
      <products>H:1 SIH2:1.0</products>
    </reaction>

    <!-- reaction 0007    -->
    <reaction reversible="yes" id="0007">
      <equation>SIH + SIH4 [=] H3SISIH + H</equation>
      <rateCoeff>
        <Arrhenius>
           <A>1.600000E+11</A>
           <b>0</b>
           <E units="cal/mol">0.000000</E>
        </Arrhenius>
      </rateCoeff>
      <reactants>SIH4:1 SIH:1.0</reactants>
      <products>H:1 H3SISIH:1.0</products>
    </reaction>

    <!-- reaction 0008    -->
    <reaction reversible="yes" id="0008">
      <equation>SI + H2 [=] SIH + H</equation>
      <rateCoeff>
        <Arrhenius>
           <A>1.500000E+12</A>
           <b>0</b>
           <E units="cal/mol">31.800000</E>
        </Arrhenius>
      </rateCoeff>
      <reactants>H2:1 SI:1.0</reactants>
      <products>H:1 SIH:1.0</products>
    </reaction>

    <!-- reaction 0009    -->
    <reaction reversible="yes" type="falloff" id="0009">
      <equation>SIH4 (+ M) [=] SIH2 + H2 (+ M)</equation>
      <rateCoeff>
        <Arrhenius>
           <A>3.119000E+09</A>
           <b>1.669</b>
           <E units="cal/mol">54710.000000</E>
        </Arrhenius>
        <Arrhenius name="k0">
           <A>5.214000E+26</A>
           <b>-3.5449999999999999</b>
           <E units="cal/mol">57550.000000</E>
        </Arrhenius>
        <efficiencies default="1.0">SI2H6:4  SIH4:4 </efficiencies>
        <falloff type="Troe">-0.4984 888.3 209.4 2760 </falloff>
      </rateCoeff>
      <reactants>SIH4:1.0</reactants>
      <products>H2:1 SIH2:1.0</products>
    </reaction>

    <!-- reaction 0010    -->
    <reaction reversible="yes" type="falloff" id="0010">
      <equation>H3SISIH (+ M) [=] H2SISIH2 (+ M)</equation>
      <rateCoeff>
        <Arrhenius>
           <A>2.540000E+13</A>
           <b>-0.22389999999999999</b>
           <E units="cal/mol">5381.000000</E>
        </Arrhenius>
        <Arrhenius name="k0">
           <A>1.099000E+30</A>
           <b>-5.7649999999999997</b>
           <E units="cal/mol">9152.000000</E>
        </Arrhenius>
        <efficiencies default="1.0">SI2H6:4  SIH4:4 </efficiencies>
        <falloff type="Troe">-0.4202 214.5 103 136.3 </falloff>
      </rateCoeff>
      <reactants>H3SISIH:1.0</reactants>
      <products>H2SISIH2:1.0</products>
    </reaction>

    <!-- reaction 0011    -->
    <reaction reversible="yes" type="falloff" id="0011">
      <equation>SI3H8 (+ M) [=] SIH4 + H3SISIH (+ M)</equation>
      <rateCoeff>
        <Arrhenius>
           <A>3.730000E+12</A>
           <b>0.99199999999999999</b>
           <E units="cal/mol">50850.000000</E>
        </Arrhenius>
        <Arrhenius name="k0">
           <A>4.360000E+73</A>
           <b>-17.260000000000002</b>
           <E units="cal/mol">59303.000000</E>
        </Arrhenius>
        <efficiencies default="1.0">SI2H6:4  SIH4:4 </efficiencies>
        <falloff type="Troe">0.4157 365.3 3102 9.724 </falloff>
      </rateCoeff>
      <reactants>SI3H8:1.0</reactants>
      <products>SIH4:1.0 H3SISIH:1</products>
    </reaction>

    <!-- reaction 0012    -->
    <reaction reversible="yes" type="falloff" id="0012">
      <equation>SI3H8 (+ M) [=] SIH2 + SI2H6 (+ M)</equation>
      <rateCoeff>
        <Arrhenius>
           <A>6.970000E+12</A>
           <b>0.96909999999999996</b>
           <E units="cal/mol">52677.000000</E>
        </Arrhenius>
        <Arrhenius name="k0">
           <A>1.730000E+66</A>
           <b>-15.07</b>
           <E units="cal/mol">60491.000000</E>
        </Arrhenius>
        <efficiencies default="1.0">SI2H6:4  SIH4:4 </efficiencies>
        <falloff type="Troe">-3.47e-05 442 2412 128.3 </falloff>
      </rateCoeff>
      <reactants>SI3H8:1.0</reactants>
      <products>SI2H6:1 SIH2:1.0</products>
    </reaction>

    <!-- reaction 0013    -->
    <reaction reversible="yes" type="falloff" id="0013">
      <equation>SI2H6 (+ M) [=] H2 + H3SISIH (+ M)</equation>
      <rateCoeff>
        <Arrhenius>
           <A>9.086000E+09</A>
           <b>1.8340000000000001</b>
           <E units="cal/mol">54197.000000</E>
        </Arrhenius>
        <Arrhenius name="k0">
           <A>1.945000E+41</A>
           <b>-7.7720000000000002</b>
           <E units="cal/mol">59023.000000</E>
        </Arrhenius>
        <efficiencies default="1.0">SI2H6:4  SIH4:4 </efficiencies>
        <falloff type="Troe">-0.1224 793.3 2400 11.39 </falloff>
      </rateCoeff>
      <reactants>SI2H6:1.0</reactants>
      <products>H2:1.0 H3SISIH:1</products>
    </reaction>

    <!-- reaction 0014    -->
    <reaction reversible="yes" type="falloff" id="0014">
      <equation>SI2H6 (+ M) [=] SIH4 + SIH2 (+ M)</equation>
      <rateCoeff>
        <Arrhenius>
           <A>1.810000E+10</A>
           <b>1.7470000000000001</b>
           <E units="cal/mol">50203.000000</E>
        </Arrhenius>
        <Arrhenius name="k0">
           <A>5.090000E+50</A>
           <b>-10.369999999999999</b>
           <E units="cal/mol">56034.000000</E>
        </Arrhenius>
        <efficiencies default="1.0">SI2H6:4  SIH4:4 </efficiencies>
        <falloff type="Troe">4.375e-05 438.5 2726 438.2 </falloff>
      </rateCoeff>
      <reactants>SI2H6:1.0</reactants>
      <products>SIH4:1.0 SIH2:1</products>
    </reaction>
  </reactionData>
</ctml>
